| 摘要 |
The present invention provides a linear evaporation deposition apparatus. The linear evaporation deposition apparatus includes: a vacuum container that includes a slit extending in a first direction; an evaporation crucible that is inserted into the slit, is disposed inside the vacuum container, includes a receiving space for receiving an evaporation material, is formed of a conductive material, generates stream by heating the evaporation material, sprays the stream through a plurality of nozzle parts communicating with the receiving space, and extends in the first direction; an inductive heating coil that forms an inductive electric field, inductively heating the evaporation crucible, extends in the first direction, is disposed outside the vacuum container, and inductively heats the evaporation crucible; and a dielectric window that is coupled to the surrounding of the slit of the vacuum container, seals the vacuum container, is disposed between the inductive heating coil and the evaporation crucible, and penetrates the inductive electric field formed by the inductive heating coil, and extends in the first direction. The linear evaporation deposition apparatus according to the present invention can increase a use efficiency of organic materials, prevent pollution of a substrate and a chamber resulting from the organic powders, and uniformly deposit a thin film. |
