发明名称 VARIABLE MASK
摘要 Disclosed is a variable mask which can change a shape of a mask pattern, can compensate for an alignment error of the mask, and can reduce replacement costs. The variable mask comprises: a mask frame having an opening unit formed therein; a plurality of support units installed in the opening unit of the mask frame; a pattern bar installed to be movable in the support unit, and dividing the opening unit into a plurality of divided opening units; and a pressurizing member installed between the support unit and the pattern bar, and moving the pattern bar.
申请公布号 KR20160093785(A) 申请公布日期 2016.08.09
申请号 KR20150014349 申请日期 2015.01.29
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 SEO, TAE AN;PARK, BO IK;PARK, JU CHAN;SEOL, YOUNG GUG;LEE, PIL SUK;CHOI, JIN HWAN
分类号 H01L51/56;H01L21/033 主分类号 H01L51/56
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