| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric actuator substrate having high connection reliability in a through hole portion, and a liquid discharge head and a recording device using the piezoelectric actuator substrate.SOLUTION: A piezoelectric actuator substrate 21 includes: a laminate in which a ceramic vibration plate 21a and a piezoelectric ceramic layer 21b are laminated; a first surface electrode 35 disposed on a main surface on the piezoelectric ceramic layer 21b side of the laminate; an internal electrode 34 disposed in the laminate; a through hole 38 passing through the piezoelectric ceramic layer 21b so as to be connected to the internal electrode 34; and a second surface electrode 37 disposed to cover the through hole 38 on the main surface on the piezoelectric ceramic layer 21b side. In the piezoelectric actuator substrate 21, the piezoelectric ceramic layer 21b at an edge 38a of the through hole 38 includes a protrusion section 38aa protruding from the main surface on the piezoelectric ceramic layer 21b side toward the outside.SELECTED DRAWING: Figure 6 |
