发明名称 Actuator
摘要 An actuator having a rotation central axis includes: an insulative frame; movable comb electrodes having first electrode teeth; a movable portion between the movable comb electrodes; supporting portions on the frame supporting the movable comb electrodes and the movable portion; fixed comb electrodes on the frame corresponding to the movable comb electrodes and provided with second electrode teeth; first elastic connecting portions connecting the movable comb electrodes to the supporting portions so each movable comb electrode can rotate around the rotation central axis; and second elastic connecting portions connecting the movable portion to the movable comb electrodes so that the movable portion can rotate around the rotation central axis. Each movable comb electrode is driven by an alternating voltage between each fixed comb electrode and movable comb electrode. Part of the first electrode teeth overlaps part of the second electrode teeth when no alternating voltage is applied.
申请公布号 US2006125346(A1) 申请公布日期 2006.06.15
申请号 US20050300109 申请日期 2005.12.14
申请人 SEIKO EPSON CORPORATION 发明人 YODA MITSUHIRO
分类号 G02B26/08;G02B26/00;H02N1/00 主分类号 G02B26/08
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