发明名称 HYBRID FULLY SOI-TYPE MULTILAYER STRUCTURE
摘要 <p>The invention proposes a SOI-type multilayer structure (105), comprising a support layer (101), at least two working layers (103, 104) having different crystalline orientations, an insulating layer (102) extending over at least a portion of said support layer (101), characterized in that said insulating layer (102) extends over the whole surface of said support layer (101), so as to extend between said support layer (101) and said working layers (103, 104). A process for manufacturing such a structure (105) is also provided.</p>
申请公布号 WO2006103491(A1) 申请公布日期 2006.10.05
申请号 WO2005IB01136 申请日期 2005.03.29
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES;LETERTRE, FABRICE;MAZURE, CARLOS 发明人 LETERTRE, FABRICE;MAZURE, CARLOS
分类号 H01L21/20;H01L21/762 主分类号 H01L21/20
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