| 摘要 |
PROBLEM TO BE SOLVED: To provide an article for producing a semiconductor or the like, which can be molded by a general method such as compression molding while hardly causing deformation. SOLUTION: The article is composed of a crosslinked body obtained by crosslinking a polytetrafluoroethylene having a reactive functional group selected from the group consisting of cyano group (-CN), a first functional group represented by the general formula (1), and a second functional group represented by the general formula (2). COPYRIGHT: (C)2009,JPO&INPIT
|
