| 摘要 |
PROBLEM TO BE SOLVED: To form a ferroelectric capacitor which shows excellent electric characteristics. SOLUTION: When a lower electrode, first, second, and third ferroelectric films, and an upper electrode are formed in order (steps S1 to S5), the first and third ferroelectric films are formed thinner than the second ferroelectric film by adding predetermined elements, and the second ferroelectric film is formed without adding such elements. Consequently, while a decrease in switching charge amount of the ferroelectric capacitor resulting from the element addition is suppressed, fatigue characteristics and imprinting characteristics thereof can be improved and a leak current is reduced. COPYRIGHT: (C)2009,JPO&INPIT
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