| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an instrument for measuring a gas flow rate in a low-boiling side of a mixed gas of two kinds of gases different in boiling points, and to provide a method for simply and accurately measuring the gas flow rate by using the instrument for measuring the gas flow rate. <P>SOLUTION: The instrument 1 includes: a reaction vessel 14 wherein the mixed gas of the two kinds of gases different in the boiling points flows for performing the reaction of a change concentration of the gas in the low-boiling side of the inflow mixed gas; a condensation vessel 3 wherein the mixed gas discharged from the reaction vessel 14 flows for condensing gas only in a high-boiling side; and a flowmeter 5 for measuring the gas flow rate in the low-boiling side of the mixed gas discharged from the condensation vessel 3 by using a pre-calculated compensation value to compensate the gas flow rate in the low-boiling side contained in the mixed gas. <P>COPYRIGHT: (C)2009,JPO&INPIT |
