Inspection device and inspection method

摘要

The disclosure provides an inspection device including a light source module, an image receiving module and a processing unit. The light source module emits a first incident light and a second incident light to a device under test (DUT). The image receiving module receives a first image corresponding to the DUT irradiated by the first incident light, and receives a second image corresponding to the DUT irradiated by the second incident light. The processing unit calculates the contrast ratio of the first image and the second image to obtain a high-contrast image for inspection.

主权项

1. An inspection device, comprising: a light source module, emitting a first incident light and a second incident light to a device under test (DUT); an image receiving module, receiving a first image generated by the DUT irradiated by the first incident light and a second image generated by the DUT irradiated by the second incident light; and a processor, calculating a contrast value of the first image and the second image to obtain a high contrast image for inspection; wherein the DUT comprises a first testing region and a second testing region, and the image receiving module receives a first sub-image generated by the first incident light illuminating the first testing region, a second sub-image generated by the first incident light illuminating the second testing region, a third sub-image generated by the second incident light illuminating the first testing region, and a fourth sub-image generated by the second incident light illuminating the second testing region, and the processor utilizes a predetermined formula to calculate contrast values of the first sub-image, the second sub-image, the third sub-image and the fourth sub-image to obtain the high contrast image for inspection, wherein each of the first sub-image, the second sub-image, the third sub-image, the fourth sub-image and the high contrast image is divided into N regions by the following formula:PFbg⁡(i,j)=P⁢⁢12⁢bg⁡(i,j)×P⁢⁢1⁢⁢4⁢bg⁡(i,j)P⁢⁢11⁢bg⁡(i,j)-P⁢⁢13⁢bg⁡(i,j) wherein PFbg(i,j) is a gray-scale value of the high contrast image PF generated by a region (i,j) of the first testing region relative to a region (i,j) of the second testing region, and P11bg(i,j) is a gray-scale value of the first sub-image generated by the region (i,j) of the first testing region, and P12bg(i,j) is a gray-scale value of the second sub-image generated by the region (i,j) of the second testing region, and P13bg(i,j) is a gray-scale value of the third sub-image generated by the region (i,j) of the first testing region, and P14bg(i,j) is a gray-scale value of the fourth sub-image generated by the region (i,j) of the second testing region.