| 摘要 |
A piezoelectric MEMS transducer comprises a substrate, at least one membrane, at least one electrically isolating layer between the membrane and the substrate, a plurality of piezoelectric actuators arranged on the membrane, at least one electrically isolating layer between the membrane and piezoelectric actuators, electrodes for electrical control of each of the piezoelectric actuators. The structure further comprises at least one recess formed into the substrate, electrically isolating layer between the membrane and the sub-strate and/or to the membrane in order to release the membrane for movement. The transducer is further arranged to receive digital signals for controlling the piezoelectric actuators via the electrodes to convert the signals into mechanical actuation of the actuators and consequently to the actuation of the membrane, said actuators being further arranged to be controlled as groups pertaining to binary values. Corresponding systems and methods are also presented. |
