SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF
摘要
Provided are a semiconductor device including a stable dummy pattern, and a manufacturing method thereof. The semiconductor device comprises: a first dummy gate having a first width; a second dummy gate having a second width to be adjacent to the first dummy gate in a longitudinal direction; and at least one bridge to connect the first and second dummy gates, wherein the widths of the first and second widths are narrower than the width of a minimum processing line.
申请公布号
KR20160094239(A)
申请公布日期
2016.08.09
申请号
KR20150029837
申请日期
2015.03.03
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
BAE, DEOK HAN;KIM, DONG KWON;KIM, JONG HYUK;PARK, YOON MOON