发明名称 SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF
摘要 Provided are a semiconductor device including a stable dummy pattern, and a manufacturing method thereof. The semiconductor device comprises: a first dummy gate having a first width; a second dummy gate having a second width to be adjacent to the first dummy gate in a longitudinal direction; and at least one bridge to connect the first and second dummy gates, wherein the widths of the first and second widths are narrower than the width of a minimum processing line.
申请公布号 KR20160094239(A) 申请公布日期 2016.08.09
申请号 KR20150029837 申请日期 2015.03.03
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 BAE, DEOK HAN;KIM, DONG KWON;KIM, JONG HYUK;PARK, YOON MOON
分类号 H01L29/66;H01L29/78 主分类号 H01L29/66
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