| 摘要 |
Disclosed are a system and a method for detecting heater disconnection of a reaction chamber. According to the present invention, the system for detecting heater disconnection of a reaction chamber includes: a voltage detection unit prepared in a reaction chamber to detect a voltage supplied to a heater heating the inside of a reactor; a current detection unit detecting a current supplied to the heater; and a heater disconnection detection unit connected to the voltage detection unit and the current detection unit, calculating a resistance value by operating a voltage value and a current value, and comparing the calculated resistance value and a reference resistance value to detect a disconnection status. |
