NITRIDE SEMICONDUCTOR ELEMENT AND DEVICE USING THE SAME, AND NITRIDE SEMICONDUCTOR ELEMENT MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a nitride semiconductor element which further inhibits alteration or deterioration of a nitride semiconductor element to achieve high reliability.SOLUTION: A nitride semiconductor element 1 comprises a sapphire substrate 10 and a nitride semiconductor part 20 which is formed on the sapphire substrate 10 and has a mesa part 21. The nitride semiconductor part 20 has a lateral face 22 composed of a cross section formed due to dicing to chips and the lateral face 22 is covered with an inorganic material 30 having a composition different from that of the nitride semiconductor part 20.SELECTED DRAWING: Figure 1