发明名称 APPARATUS FOR INSPECTING SURFACE
摘要 Provided is an apparatus to inspect a surface, comprising: an image device analyzing a foreign substance by detecting laser beams scattered from an object when a laser beam having a line shape is projected onto the object; and a remaining beam dump trapping laser beams having a page shape reflected from the object when the laser beam having a line shape is projected onto the object.
申请公布号 KR20160101317(A) 申请公布日期 2016.08.25
申请号 KR20150023587 申请日期 2015.02.16
申请人 SAMSUNG ELECTRONICS CO., LTD.;SAMSUNG DISPLAY CO., LTD. 发明人 SEO, WON GUK;KIM, KYOUNG CHON;YOON, KUI HYUN;KIM, KYUN LAE;KIM, YOUNG GWON;YANG, KYOUNG HO;HEO, YOUNG
分类号 G01N21/95;G01N21/39;G01N21/47;G01N21/958 主分类号 G01N21/95
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