| 摘要 |
This invention relates to a (preferably brushless) electrical contact, suitable for use in an apparatus, such as a cylindrical magnetron sputtering device, in which electrical power needs to be transmitted from an essentially static part (5, 6) of the apparatus on the atmosphere side, to a dynamic (rotating) part (8) on the vacuum side. The electrical contact provides an electrical connection across a dynamic (moving) interface between a first static part (5, 6) and a second dynamic part (8) and comprises a liquid (7) retained, and interposed, between the static (5, 6) and dynamic (8) parts. The liquid (7) comprises a high electrical conductivity liquid, such as a liquid metal, and preferably Gallium or a Gallium alloy. The high electrical conductivity liquid (7) suitably provides a low-friction interface between the static (5, 6) and dynamic (8) parts, and may also form a dynamic seal therebetween. The high electrical conductivity liquid (7) is suitably retained by exploiting its surface tension properties. |
