发明名称 ALUMINA SINTERED COMPACT AND ITS PRODUCTION
摘要 PROBLEM TO BE SOLVED: To provide an alumina sintered compact having a low content of <100 ppm impurity elements except aluminum and extremely few pores. SOLUTION: This method for producing an alumina sintered compact having <=10 &mu;m maximum diameter of pore, <=20 pores/1 mm2 number of pores having 1 &mu;m-10 &mu;m maximum diameter existing in a unit area and <100 ppm content of impurity elements except aluminum comprises molding alumina powder which has substantially no fracture and is composed of a primary particle of polyhedron and in which when the maximum particle diameter parallel to a hexagonal lattice plane of &alpha;-alumina of hexagonal closed-packed lattice is D and a particle diameter perpendicular to the hexagonal closed-packed plane is H, the alumina powder is composed of &alpha; alumina particles having >=0.5 and <=3.0 ratio of D/H, 0.01 &mu;m to 1.0 &mu;m number-average particle diameter of the &alpha; alumina particles and a particle size distribution of <=10 ratio of D90/D10 when particle diameters at 10% accumulation and at 90% accumulation from the fine particle side are D10 and D90, respectively and >=99.99% purity and sintering the molding product in the atmosphere at 1,500 deg.C to 1,800 deg.C.
申请公布号 JP2000044330(A) 申请公布日期 2000.02.15
申请号 JP19980213947 申请日期 1998.07.29
申请人 SUMITOMO CHEM CO LTD 发明人 WATANABE TAKASHI;UCHIDA YOSHIO
分类号 C04B35/10;H01L21/68;H01L21/683 主分类号 C04B35/10
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