摘要 |
The invention relates to an electron bombarded image sensor array device comprising a vacuum chamber having a photocathode capable of releasing electrons into said vacuum chamber when exposed to light impinging on said photocathode, a photocathode capable of releasing electrons into said vacuum chamber when exposed to light impinging on said photocathode, electric field means for accelerating said released electrons from said photocathode toward s an anode spaced apart from said photocathode in a facing relationship to receive an electron image from said photocathode, said anode being construct ed as a back-thinned image sensor array having electric connecting pads distributed according to a pattern along the surface area of said sensor facing away from said photocathode, a carrier on which said image sensor arr ay is mounted, said carrier having electric connecting pads distributed accordi ng to a pattern to feed electric signals from said image sensor array outside said vacuum chamber and electric connecting means for electrically connectin g at least one of said electric connecting pads of said image sensor array wit h at least one of said electric connecting pads of said carrier. |