发明名称 High angular intensity schottky electron point source
摘要 <p>An electron emitter is produced by applying a work function lowering material that does not require an extensive heating step before the material will function to lower the work function. By eliminating the extensive heating step, a small radius, highly tapered emitter tip will retain its shape to consistently produce a high angular intensity at a reasonable output power level. </p>
申请公布号 EP1359599(A3) 申请公布日期 2007.09.19
申请号 EP20020080322 申请日期 2002.12.17
申请人 FEI COMPANY 发明人 SCHWIND, GREGORY A.;JUN, DAVID S.;MAGERA, GERALD G.
分类号 H01J9/04;H01J9/02;H01J1/14;H01J1/308;H01J37/073 主分类号 H01J9/04
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