发明名称 |
High angular intensity schottky electron point source |
摘要 |
<p>An electron emitter is produced by applying a work function lowering material that does not require an extensive heating step before the material will function to lower the work function. By eliminating the extensive heating step, a small radius, highly tapered emitter tip will retain its shape to consistently produce a high angular intensity at a reasonable output power level.
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申请公布号 |
EP1359599(A3) |
申请公布日期 |
2007.09.19 |
申请号 |
EP20020080322 |
申请日期 |
2002.12.17 |
申请人 |
FEI COMPANY |
发明人 |
SCHWIND, GREGORY A.;JUN, DAVID S.;MAGERA, GERALD G. |
分类号 |
H01J9/04;H01J9/02;H01J1/14;H01J1/308;H01J37/073 |
主分类号 |
H01J9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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