ADVANCED MULTILAYERED CORELESS SUPPORT STRUCTURE, AND THEIR FABRICATION

摘要

PROBLEM TO BE SOLVED: To provide a method of fabricating a free standing membrane including a via array in a dielectric used as a precursor in the construction of superior electronic support structures.

SOLUTION: The method includes stages of: (I) fabricating a membrane including conductive vias in a dielectric environment on a sacrificial carrier, and (II) detaching the membrane from the sacrificial carrier to form a free standing laminated array. A method of fabricating an electronic substrate based on such a membrane including at least the stages of: (I) fabricating a membrane including conduction vias in a dielectric environment on a sacrificial carrier, and (II) detaching of the membrane from the sacrificial carrier to form a free standing laminated array; (V) thinning and planarizing; and (VII) terminating.

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