| 摘要 |
PROBLEM TO BE SOLVED: To improve heat resistance property while suppressing the deterioration of fluidity of an aluminum film. SOLUTION: After formation of a high purity aluminum film 15 on an insulating layer 13 with an ion beam deposition method or the like, an added element film 16 including the added element 17 is formed on the high purity aluminum film 15 and heat-processed with the ion beam deposition method. Accordingly, the added element 17 included in the added element film 16 can be diffused into the high purity aluminum film 15 and the added element 17 can be added to the high purity aluminum film 15. COPYRIGHT: (C)2009,JPO&INPIT
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