| 摘要 |
PROBLEM TO BE SOLVED: To provide a storage device having a reading/writing probe having high durability to a foreign matter and a high resolution. SOLUTION: This head has a first insulating film 12 having first and second surfaces, a supporting body 11a formed at a part of the first surface of the first insulating film 12, a conductive film 13 formed on the second surface of the first insulating film 12, an acute part 13b which is formed on a part of the conductive film 13 and becomes the tip of a probe performing either of information reading and information writing, a second insulating film 18a formed on the conductive film 13 and having an aperture pattern including the acute part 13b on the inner side, and a third insulating film 19a which is formed on the second insulating film 18a, has an aperture pattern substantially the same as the aperture pattern of the second insulating film 18a and composed of a material different from a material of the second insulating film 18a and whose uppermost surface is lower in height than the acute part 13b. COPYRIGHT: (C)2009,JPO&INPIT
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