FILM DEPOSITION DEVICE, FILM DEPOSITION METHOD, AND MAGNETIC RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a film deposition device capable of reducing magnetic noise generated in a soft magnetic layer and suppressing ruggedness of an interface, to provide a film deposition method and to provide a magnetic recording medium. SOLUTION: The film deposition device is provided with a plurality of first chambers 11 for forming a soft magnetic thin film on a base material by sputtering and at least one second chamber 12 for layering and forming a non-magnetic thin film on the soft magnetic thin film by sputtering. The first chambers 11 and the second chamber 12 are alternately disposed along a conveyance path of the base material. COPYRIGHT: (C)2009,JPO&INPIT