发明名称 |
塗布装置及び塗布方法 |
摘要 |
A coating device for coating a coating liquid onto a substrate includes: a coating head having a coating-liquid outlet, adapted to move with respect to the substrate along a first axial direction and capable of coating the substrate with coating liquid through the coating-liquid outlet; and adjustment unit connected to the coating head and including a movable pad disposed proximal to the coating-liquid outlet and adapted to move along a second axial direction for adjusting the size of the opening of the coating-liquid outlet; and a drive assembly connected to the adjustment unit for controlling the adjustment unit to move along the second axial direction. Additionally a coating method is provided. |
申请公布号 |
JP5923563(B2) |
申请公布日期 |
2016.05.24 |
申请号 |
JP20140161104 |
申请日期 |
2014.08.07 |
申请人 |
ティーピーケイ タッチ ソリューションズ インコーポレーテッド |
发明人 |
フアン ジュンヤオ;チェン インチェ;ハング ポピン;チャング イツェング |
分类号 |
H01L21/027;B05C5/02;B05D1/26 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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