MEMS resonator pressure sensor

摘要

A resonant MEMS pressure sensor in which the resonator mass of the MEMS resonator is anchored both to the fixed base beneath the resonator cavity as well as to the top membrane over the resonator cavity. This provides a more robust fixing of the resonator mass and offers a dependence of resonant frequency on the pressure outside the cavity.

主权项

1. A pressure sensor comprising:
a MEMS resonator formed within a cavity, wherein the cavity comprises a fixed base and a top membrane which deforms in response to the pressure to be sensed, wherein the resonator has a resonant frequency which is dependent on the incident pressure, wherein the MEMS resonator comprises a resonator mass that comprises a beam with a first and a second anchor at each end of the beam, and wherein the first anchors connect to the fixed base and the second anchors connect to the top membrane.