| 摘要 |
PROBLEM TO BE SOLVED: To secure safety while performing high-accuracy measurement at high speed.SOLUTION: A measurement light emitted by a measurement laser light source 1 and an aiming light emitted by an aiming laser light source 2 are wavelength-combined by a fiber type WDM optical coupler 3 and then branched into two beams by a beam splitter 5. Each beam is radiated onto the irradiation area of a measurement object from diagonally upward in a positive movement direction of the irradiation area and diagonally upward in a negative movement direction of the irradiation area, and the scattered light of the measurement light is detected by a photodetector 8. A measurement unit 9 measures the movement speed of the measurement object on the basis of the beat frequency of a detection signal. The measurement laser light source 1 emits, as a measurement light, a near infrared ray laser in 1400 nm to 2600 nm called an eye-safe laser. The aiming laser light source 2 emits a red laser in wavelength of 635 nm as an aiming light.SELECTED DRAWING: Figure 1 |
