| 摘要 |
[Objective] To reduce the specific resistance of a heat-generating resistor of a ceramic heater while ensuring the strength of the ceramic heater and to suppress the occurrence of cracks in the heat-generating resistor. [Means for Solution] The ceramic heater 100 includes a substrate 10 formed from an insulating ceramic and a heat-generating resistor 20 formed inside the substrate 10 and containing tungsten carbide (WC) and silicon nitride (Si 3 N 4 ). In any cross section of the heat-generating resistor 20, the ratio of the area of tungsten carbide portions to the total area of the cross section is 33 to 67%, and the average diameter of tungsten carbide aggregates that is measured by a line intercept method is 1.4 to 7.0 µm. |
