| 摘要 |
The present invention relates to a measurement setup for measuring radiation energy, in particular of EUV-radiation and/or soft X-rays. The measurement setup comprises a debris mitigation unit (2, 14) with several passages allowing a straight pass of incoming radiation and a radiation-sensitive element (10, 15) delivering an electrical signal dependent on an energy of incident radiation. The radiation-sensitive element (10, 15) is arranged to measure a fraction of said incoming radiation after passing said debris mitigation unit (2, 14) at least partly. The debris mitigation unit (2, 14) of the present setup is mounted allowing a rotation around a central axis (8) of said debris mitigation unit (2, 14) during operation. Said radiation-sensitive element (10, 15) and/or one or several mirrors (11) guiding said fraction of said radiation to said radiation-sensitive element (10, 15) is/are fixed to said rotating debris mitigation unit (2, 14).
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