| 摘要 |
An evaporation crucible and an evaporation apparatus having adapted evaporation characteristics are provided to allow a thin film to be deposited on a substrate or a carrier thin film without contamination due to external particles. An evaporation crucible(100) comprises a conductive body(120), first and second heating parts(122,124), and a supply opening(134). The body includes first and second electrical connection units(162,164) to apply heating current therethrough, and a chamber(130) providing a melting-evaporating section. The first and second heating parts are adjacent to the chamber while being provided between the first and second electrical connection units, respectively. The supply opening supplies materials. A cover forms an enclosure together with the chamber. A distributor hole(170) serves as a steam discharge port of the enclosure.
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