| 摘要 |
A knife for cleaning a substrate is provided to maintain a constant application thickness of a droplet by preventing a cleaning solution from irregularly dropping on the substrate. A knife for cleaning a substrate includes a main body(10), a plug(11), an electromagnet(12), and a controller(50). A receiving space is formed in the main body, which has a nozzle facing toward a substrate to be cleansed. A cleaning solution is received in the receiving space through a path, which is opened and closed by a valve. The magnetic plug is embedded in the inner space of the main body and configured to open and close the nozzle. The electromagnet applies a magnetic force on the plug, such that the plug is elevated with respect to the nozzle and the nozzle is opened and closed. The controller controls magnetization of the electromagnet, such that the plug is elevated up and down.
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