| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology capable of improving substantial sensitivity by suppressing false reports, while keeping the whole defect capturing rate high, in order to solve the problem wherein high-sensitivity inspection becomes impossible because many false reports are detected when the sensitivity is set high in visual inspection. SOLUTION: This method has a constitution wherein an image characteristic quantity is calculated based on an image of a detected defect, and a coordinate characteristic quantity is calculated based on a position coordinate of the detected defect, and false report determination is performed following a decision tree comprising threshold processing to either of the image characteristic quantity and the coordinate characteristic quantity. Resultantly, since discrimination between an actual defect and a false report can be performed accurately by performing the false report determination following the decision tree by utilizing the image characteristic quantity and the coordinate characteristic quantity, high-sensitivity inspection becomes possible, while suppressing false reports. COPYRIGHT: (C)2009,JPO&INPIT
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