| 摘要 |
PROBLEM TO BE SOLVED: To provide a noncontact three-dimensional shape measuring machine hardly generating a measurement error of a scanning direction position, even when performing imaging at every fixed time interval. SOLUTION: This noncontact three-dimensional shape measuring machine for detecting the shape of a measuring object by an optical cutting method is equipped with a projection optical system 2 for projecting slit light to the measuring object from the first direction; a non-telecentric imaging optical system 4 provided in the second direction which is different from the first direction, for receiving reflected or scattered light from the measuring object 3 and detecting deformation of a slit image; and a moving mechanism 6 for moving the measuring object 3 in the approximately vertical direction to the longitudinal direction of the slit light. The noncontact three-dimensional shape measuring machine has a characteristic wherein a condensing position of the slit light emitted from the projection optical system 2 passes an intersection point (reference point) between an optical axis of the projection optical system 2 and an optical axis of the imaging optical system 4, and is separated from a plane (reference plane) in parallel with the moving direction of the measuring object 3 by a prescribed distance in the optical axis direction of the projection optical system 2. COPYRIGHT: (C)2009,JPO&INPIT
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