| 摘要 |
PROBLEM TO BE SOLVED: To provide a humidity sensor enhanced in humidity sensitivity and improved in measuring precision by suppressing the expansion of a polymer film caused by the absorption of water. SOLUTION: A pair of reticulated or porous electrodes 4a and 4b pervious to moisture are arranged on both sides of a first polymer film 3, second polymer films 6a and 6b comprising the same material as the first polymer film 3 are arranged respectively outside of the electrodes 4a and 4b and reticulated or porous lid bodies 7a and 7b pervious to moisture are arranged respectively outside of the second polymer films 6a and 6b to be fixed to a frame body 2. The balance between the expansion forces P1, P2 and P3 during water absorption of the first polymer film 3 and the second polymer films 6a and 6b is optimized to suppress the expansion of the first polymer film 3 due to water absorption to achieve the humidity sensor enhanced in humidity sensitivity and improved in measuring precision. COPYRIGHT: (C)2009,JPO&INPIT
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