| 摘要 |
A method for forming functional nano pattern is provided to directly apply specific functions to 3D surface-modified nano pattern. A method for forming functional nano pattern is characterized by activating surface of nano structure having nano-sized protrusions in order to be covalently bonded with organic materials and contacting a stamp(100) coated with organic materials to the nano structure surface so as to immobilize the organic materials by the nano-sized protrusions. A substrate(102) having nano structure with nano-sized protrusions is transferred by a nano imprint method using intaglio structure of anodized aluminum oxide. The method for activating the surface of the substrate is processed through a plasma treatment. The plasma treatment represents oxygen plasma or ammonia plasma. |
