发明名称 EMCW LAYER THICKNESS MEASUREMENT APPARATUS AND METHOD
摘要 A method is provided for measuring a distance to a surface of an object using an electromagnetic continuous wave (EMCW). The method comprises obtaining an estimation dE of the distance to the surface. The method further comprises generating an electromagnetic continuous wave (EMCW) having a frequency in the range between about 100MHz and about 1THz, wherein the EMCW is frequency modulated so that the frequency thereof is controllably varied and transmitting a measurement portion of the EMCW towards the surface of the object. The method further comprises receiving a received signal from a reflection of the transmitted EMCW from the surface of the object and generating a combined signal by combining the received signal with a delayed signal, the delayed signal being obtained by delaying a reference portion of the EMCW by a controllably variable time delay∆T, ∆T being dictated by dE. The method further comprises measuring a parameter of the combined signal, thereby measuring the distance to the surface of the object.
申请公布号 WO2016110849(A1) 申请公布日期 2016.07.14
申请号 WO2016IL50017 申请日期 2016.01.07
申请人 SYSMETRIC LTD. 发明人 GOZNI, GILI;MAOZ, SHAIKE
分类号 G01S13/32;G01S13/08 主分类号 G01S13/32
代理机构 代理人
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