Capacitor arrays for minimizing gradient effects and methods of forming the same

摘要

Semiconductor devices having capacitor arrays. A semiconductor device is formed including a capacitor array formed in a plurality of cells in a two-dimensional grid. The capacitor array includes a plurality of operational capacitors formed in a first subset of the plurality of cells along a diagonal of the capacitor array. A first operational capacitor is formed in a cell at a first edge of the capacitor array and at a first edge of the diagonal of the capacitor array. The capacitor array also includes a plurality of dummy patterns formed about the plurality of operational capacitors in the capacitor array in a second subset of the plurality of cells to achieve symmetry in the grid about the diagonal. Each one of the plurality of operational capacitors is electrically coupled to another one of the plurality of operational capacitors.

主权项

1. A semiconductor device, comprising:
a capacitor array formed in a plurality of cells of a two-dimensional grid, comprising:
a plurality of operational capacitors formed in a first subset of the plurality of cells along a diagonal of the array wherein a first operational capacitor is formed in a cell at a first edge of the two-dimensional grid and at a first edge of the diagonal of the capacitor array; anda plurality of dummy patterns formed about the plurality of operational capacitors in the capacitor array in a second subset of the plurality of cells to achieve symmetry in the grid about the diagonal;wherein each one of the plurality of operational capacitors is electrically coupled to another one of the plurality of operational capacitors and wherein the cells of the respective operational capacitors that are electrically coupled to each other are non-adjacent to each other; andwherein operational capacitors are formed in each cell of the diagonal of the array, the diagonal including operational capacitors but not dummy patterns.