PIEZOELECTRIC THIN FILM ELEMENT, PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC SENSOR, HARD DISK DRIVE AND INK JET PRINTER DEVICE

摘要

PROBLEM TO BE SOLVED: To compensate the oxygen defect of a piezoelectric thin film that constitutes a piezoelectric thin film element thereby to improve piezoelectric characteristics further more and reduce a leakage current density further more.SOLUTION: A piezoelectric thin film element includes a pair of electrode layers and a piezoelectric thin film sandwiched by the pair of electrode layers. The pair of electrode layers comprise Pt (platinum), and oxide particles are contained in at least one of the electrode layers. The oxide particles are: oxide particles of at least one element that constitutes the piezoelectric thin film; or oxide particles of Pt.SELECTED DRAWING: Figure 1