发明名称 MEMS DEVICE WITH COMMON MODE REJECTION STRUCTURE
摘要 A MEMS device includes a drive spring system coupling a pair of drive masses and a sense spring system coupling a pair of sense masses. The drive spring system includes a constrained stiff beam and flexures interconnecting the pair of drive masses. In response to drive movement of the drive masses the flexures enable pivotal movement of the constrained stiff beam about its center hinge point to enable anti-phase drive motion of the drive masses and to suppress in-phase motion of the drive masses. The sense spring system includes diagonally oriented stiff beams and a spring system that enable anti-phase sense motion of the sense masses while suppressing in-phase motion of the sense masses. Coupling masses interposed between the drive and sense masses decouple the drive motion of the drive masses from the sense motion of the sense masses.
申请公布号 EP3106834(A1) 申请公布日期 2016.12.21
申请号 EP20160174745 申请日期 2016.06.16
申请人 NXP USA, Inc. 发明人 McNeil, Andrew;Shao, Peng
分类号 G01C19/5747 主分类号 G01C19/5747
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