| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a filter device for removing impurities included in a gas, which maintains a high performance, is small and inexpensive, and has a good maintainability. <P>SOLUTION: The filter device which removes waste in the gas includes: a filter housing formed so that a cross section perpendicular to a gas stream direction becomes larger on an opening side than a gas outlet side toward a gas flow passageway direction; a freely detachable filter cover having a gas inlet; two or more filters; and a filter holding part for detaching the filter from the filter housing. This constitution facilitates the detaching work of the filter and improves the maintainability. In addition, the provision of a hole for a filter support restricts the drift of the gas that enters in the filter, thereby improving the availability of the filter and achieving the miniaturization and cost reduction. <P>COPYRIGHT: (C)2012,JPO&INPIT |
