发明名称 Microbridge structure with reinforcement section
摘要 A microbridge structure includes a thin film section provided to be spaced from a substrate, and a supporting section formed around the thin film section and also spaced from the substrate, for supporting the thin film section. The supporting section is reinforced by a first reinforcement section, and the thin film section is reinforced by a second reinforcement section.
申请公布号 US6165587(A) 申请公布日期 2000.12.26
申请号 US19980150329 申请日期 1998.09.09
申请人 HONDA GIKEN KOGYO KABUSHIKI KAISHA 发明人 NONAKA, KEN-ICHI
分类号 G01J1/02;H01L27/14;H01L27/16;(IPC1-7):B32B7/00;B32B3/00;G01J5/00;H01L21/76;H01L29/06 主分类号 G01J1/02
代理机构 代理人
主权项
地址