КОМПЛЕКС ЦИРКОНИЯ, ИСПОЛЬЗУЕМЫЙ ДЛЯ СПОСОБА CVD, И СПОСОБ ПОЛУЧЕНИЯ ТОНКОЙ ПЛЕНКИ С ЕГО ИСПОЛЬЗОВАНИЕМ

摘要

In the preparation of a PZT thin film by the liquid source CVD method, using zirconium tetrakis(isobutyrylpivaloylmethanate) as a zirconium precursor enables to obtain a constant composition ratio of films within a wide range of the substrate temperature, and negates the need for the thermal treatment alter the film preparation. Accordingly, the present invention provides a PZT thin film having a constant quality at a low cost.