发明名称 |
Method of reducing particle count inside a furnace and method of operating the furnace |
摘要 |
A method for reducing particle count inside a furnace for processing semiconductor devices is provided. The method includes performing a gas blowing step to feed a gas into the furnace and performing a continuous gas pumping step simultaneous with performing the gas blowing step for extracting the gas from the furnace while a constant pressure is maintained inside the furnace.
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申请公布号 |
US2007218694(A1) |
申请公布日期 |
2007.09.20 |
申请号 |
US20060378868 |
申请日期 |
2006.03.16 |
申请人 |
HUNG CHENG-CHUNG;YEH CHIU-HSIEN |
发明人 |
HUNG CHENG-CHUNG;YEH CHIU-HSIEN |
分类号 |
H01L21/302;H01L21/461 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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