| 摘要 |
PROBLEM TO BE SOLVED: To provide an abnormality detecting method for more easily detecting an abnormality than a conventional upper and lower limit value checking method, and to provide a substrate treatment system 300 including: a group management device 302 having an upper and lower limit value checking function to flexibly cope with the state change of the device; and a plurality of substrate treatment devices 100 to be connected to the group management device 302. SOLUTION: The substrate treatment devices 100 perform a treatment in the substrate by operating a plurality of components constituting the substrate treatment devices. The abnormality detecting method is used to detect the abnormality in the substrate treatment devices 100 by acquiring data to be received from the respective components, so as to monitor the data. Any item among the plurality of items is selected with respect to one component among the respective components, so as to set a detection condition 2 for regulating a condition to detect data concerning the item and a determination condition 3 for regulating a temporal range to satisfy the detection condition 2. When data concerning the item satisfies the detection condition 2, it is determined whether the determination condition is satisfied or not. COPYRIGHT: (C)2008,JPO&INPIT
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