| 摘要 |
<p>A fluid control apparatus comprising a plurality of fluid control members 7, 8, 9, 10 arranged at an upper level and a plurality of couplings 11, 12, 13, 14, 15 arranged at a lower level. The second fluid control member 8 from left comprises a pressure regulator 19 and a pressure sensor 20 which are integrally provided on a blocklike body 18 mounted on the coupling 12 so as to be removable upward. The third fluid control member 9 from left comprises on-off valves 23, 24 integrally provided on a blocklike body 22 which is mounted on the couplings 13, 14 so as to be removable upward. <IMAGE></p> |
