PIEZOELECTRIC MICRO-BLOWER

摘要

[PROBLEMS] A piezoelectric micro-blower that can transfer a large amount of compressive fluid without using a check valve and in which noise leaking to the outside is suppressed. [MEANS FOR SOLVING PROBLEMS] A first wall (12) and a second wall (10) are arranged in a blower body (1), and openings (12a, 10a) are formed at those portions of the walls which correspond to the center of a diaphragm (2). An inlet path (11b) for interconnecting the openings (12a, 10a) and the outside is formed between both the walls. When a voltage is applied to a piezoelectric element (22) to vibrate the diaphragm (2), that portion of the first wall (12) which is located on the periphery of the opening (12a) vibrates. This causes gas to be sucked from the inlet path (11b) and discharged from the opening (10a). Sound absorbing branch paths (11c) are connected to the middle of the inlet path (11b) to prevent noise produced in the vicinity of the opening (10a) from leaking to the outside.