| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer housing container capable of effectively excluding the risk that dust is generated by moving a wafer during transportation or the like and that the wafer may be contaminated by the generation of dust.SOLUTION: The wafer housing container comprises: a container body 1 in which a semiconductor wafer is accommodated; and a lid 20 that is fitted to an opened front face 2 of the container body 1. On inner surfaces of both sidewalls 6 of the container body 1, support pieces 7 are oppositely provided for supporting both sides of an edge of the semiconductor wafer. On an opposing back face of the lid 20 opposite to the semiconductor wafer, a front retainer 40 is mounted for holding a front side of the edge of the semiconductor wafer. At the back of an inner part of the container body 1, a support groove 30 is formed for the floated semiconductor wafer, and an opening angle θ1 formed from a pair of guide inclined surfaces of the groove is set from 60° to 110°. In a holding block 43 of the front retainer 40, a holding groove is formed for holding the front side of the edge of the semiconductor wafer, and an opening angle θ2 formed from a pair of holding inclined surfaces of the groove is set from 10° to 90°.SELECTED DRAWING: Figure 1 |
