БОЛОМЕТРИЧЕСКИЙ РЕЗИСТИВНЫЙ ЭЛЕМЕНТ

摘要

FIELD: measurement technology. ^ SUBSTANCE: thermo-sensitive layer of element is made of titanium nitride with thickness of 0,003-0,015 mcm. There is layer inside membrane above thermo-sensitive layer which is separated from it by dielectric layer of membrane. The layer absorbs IR-radiation. Onto face side of substrate the layer is made to reflect IR-radiation. Space between thermo-sensitive and absorbing layers provides electric isolation between layers and is determined by dielectric material of membrane. ^ EFFECT: improved sensitivity of bolometric element; reduced production cost; low noise. ^ 2 cl, 2 dwg