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发明名称
DEVICE FOR HOLDING A BEAM SPLITTER ELEMENT
摘要
申请公布号
EP1554622(A1)
申请公布日期
2005.07.20
申请号
EP20030757915
申请日期
2003.10.07
申请人
CARL ZEISS SMT AG
发明人
WEBER, ULRICH;KOHL, ALEXANDER;HOLDERER, HUBERT;SCHOEPPACH, ARMIN;GABER, ERWIN;KAISER, WINFRIED;GARREIS, REINER;GRUNER, TORALF
分类号
G02B7/00;G02B7/18;G03F7/20;(IPC1-7):G02B17/08
主分类号
G02B7/00
代理机构
代理人
主权项
地址
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