发明名称 PHOTOSENSITIVE ELEMENT, RESIST PATTERN FORMING METHOD USING SAME AND METHOD FOR MANUFACTURING PRINTED WIRING BOARD
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive element which reduces the trailing amount of a resist pattern while having excellent resolution, and can form a resist pattern having a good shape of a lateral face thereof. <P>SOLUTION: The photosensitive element has on a resin film 10 a photosensitive layer 14 comprising a photosensitive resin composition containing (A) a binder polymer, (B) a photopolymerizable compound having an ethylenically unsaturated bond and (C) a photopolymerization initiator, wherein the component (A) has an acid number of 50-120 mgKOH/g and the resin film 10 has a haze of &le;1%. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006227206(A) 申请公布日期 2006.08.31
申请号 JP20050039615 申请日期 2005.02.16
申请人 HITACHI CHEM CO LTD 发明人 KUBOTA MASAO;TAKANO SHINJI
分类号 G03F7/033;C08F265/06;G03F7/004;G03F7/027;G03F7/028;G03F7/09;G03F7/40;H05K3/06;H05K3/18 主分类号 G03F7/033
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