THE STRUCTURE OF ACCELERATION SENSOR AND METHOD FOR MANUFACTURING THEREOF

摘要

A structure of an acceleration sensor and a method for manufacturing thereof are provided to suppress attachment of a stopper part and a weight part by preventing sticking effect in a manufacturing process of the acceleration sensor. A first substrate includes a weight fixing part(131), a pedestal fixing part(111) surrounding the weight fixing part, a beam part(120) for connecting flexibly the weight fixing part and the pedestal fixing part, and a stopper part(140) for separating the weight fixing part and the beam part from each other in order to be connected to the pedestal fixing part. A weight part(133) is connected to the weight fixing part by inserting a first connective layer into the weight fixing part. The weight part is overlapped with the stopper part. A pedestal part(113) is separated from the weight part and is connected to the pedestal fixing part by inserting a second connective layer into the pedestal fixing part. A protrusion part(150) is separated from the stopper part and is formed on the weight part facing the stopper part.