发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method thereof in which the deterioration of a nitride semiconductor layer is suppressed.SOLUTION: A semiconductor device includes: a substrate 10 having a first region 10a and a second region 10b adjacent to the first region 10a, in which the thickness of the first region 10a is smaller than the thickness of the second region 10b; and a nitride semiconductor layer 30 that is provided on the first region 10a of the substrate 10.SELECTED DRAWING: Figure 1
申请公布号 JP2016174054(A) 申请公布日期 2016.09.29
申请号 JP20150052738 申请日期 2015.03.16
申请人 TOSHIBA CORP 发明人 SHIBATA TAKESHI
分类号 H01L21/338;H01L29/778;H01L29/812 主分类号 H01L21/338
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